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Volume 28 | Number 2 | Year 2015 | Article Id. IJETT-V28P256 | DOI : https://doi.org/10.14445/22315381/IJETT-V28P256
Design and simulation of FBAR with different electrodes material configuration
Yatin Kumar, Kamaljit Rangra, Ravinder Agarwal
Citation :
Yatin Kumar, Kamaljit Rangra, Ravinder Agarwal, "Design and simulation of FBAR with different electrodes material configuration," International Journal of Engineering Trends and Technology (IJETT), vol. 28, no. 2, pp. 294-299, 2015. Crossref, https://doi.org/10.14445/22315381/IJETT-V28P256
Abstract
Thin film bulk acoustic resonator (FBAR) with high operating frequencies and the higher quality factor are preferred for many sensing applications. This paper presents FBAR device geometry for the different electrodes material optimize for the frequency range of 2.17 GHz to 4.49 GHz with the thickness of 1 ?m of the Aluminum nitrite (AlN) as a piezoelectric layer. The effective couplings of range 5.88% to 6.89% have been achieved. The quality factor for the different electrode materials varies from 360 to 820 for the same boundary conditions. Aluminum electrodes results in higher operating frequency as compared to platinum and tungsten. However, use of Al electrodes leads to lower coupling coefficient and quality factor as compared to platinum and tungsten. The equivalent Butterworth Van-Dyke (BVD) electrical parameters are also extracted. FBAR’s flexibility of operating frequency, coupling coefficient and quality factor are achieved by different electrode configuration.
Keywords
Film Bulk Acoustic Resonator (FBAR), Quality Factor (Q), Coupling coefficient, CoventorWare, Aluminum Nitrite, Butterworth Van-Dyke (BVD)
References
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