Design of a Microcantilever for Biosensing Applications

Shilpa Nagod; S.V Halse

doi:https://doi.org/10.14445/22315381/IJETT-V52P218

Research Article | Open Access | Download PDF

Volume 52 | Number 2 | Year 2017 | Article Id. IJETT-V52P218 | DOI : https://doi.org/10.14445/22315381/IJETT-V52P218

Design of a Microcantilever for Biosensing Applications

Shilpa Nagod, S.V Halse

Citation :

Shilpa Nagod, S.V Halse, "Design of a Microcantilever for Biosensing Applications," International Journal of Engineering Trends and Technology (IJETT), vol. 52, no. 2, pp. 115-117, 2017. Crossref, https://doi.org/10.14445/22315381/IJETT-V52P218

Abstract

This paper presents the design and simulation of MEMS Microcantilever that is made up of Silicon Nitride coated with gold which is largely used for Biosensing applications. Here in, a simple microcantilever is designed and its simulation results are analysed to study stress, displacement, Eigen Frequency using Comsol Multiphysics.

Keywords

MEMS, Eigen Frequency, Microcantilever, Stress.

References

[1] T. Thundat, P.I. Oden, and R. J. Warmack, Microcantilever sensors, Microscale Thermophys Eng, vol. 1., pp. 185–199, 1997.
[2] J. Thaysen, and A. Boisen, Atomic force microscopy probe with piezoresistive readout and a highly symmetrical Wheatstone bridge arrangement, Sensors and Actuators A, vol. 83, pp. 47–53, 2000.
[3] T. Gotszalk, P. Grabiec, and I. W. Rangelow, Piezoresistive sensors for Scanning probe microscopy, Ultramicroscopy, vol. 82, pp. 39–48, 2000.
[4] L. A. Pinnaduwage, A. Gehl, D. L. Hedden, G. Muralidharan, T. Thundat, R. T. Lareau, T. Sulchek, L. Manning, B. Rogers, M. Jones, J. D. Adams, A microsensor for trinitrotoluene vapor, Nature, vol. 425, pp. 474, 2003.
[5] Roberto Raiteri, Massimo Grattarola, Hans Jurgen Butt, Petr Skladal, Micromechanical cantilever-based biosensors, Sensors and Actuators A, 4010, pp. 1–12, 2001.
[6] www.wikipedia.org